New Product

mmWave / 5G PXIe Production Test System

  • mmWave Device Production Test and Characterization
  • DC, Parametric and RF Test Capabilities
  • PXIe based, Compact, Scalable Platform
  • Supports Up to 20 RF Ports
  • 50 GHz Signal Delivery to the Device Under Test
  • Comprehensive ICEasy Semiconductor Test Suite
  • Intuitive ATEasy® - Integrated Test Executive / Development Environment


The 5G mmWave test system delivers proven performance up to 50 GHz. The system incorporates laboratory grade PXIe RF instrumentation with a high performance receiver interface for packaged or wafer test / characterization of mmWave devices. In addition, MTS offers a full suite of digital and parametric test capabilities as well as SPI/I2C interface support for controlling / monitoring the device under test (DUT).

The base system includes a PXIe chassis with 64 dynamic digital I/O channels, 64 static digital I/O channels, a user programmable power supply, a system self-test and fixture. Additional PXIe slots are available for adding RF instrumentation, more digital and analog test resources as needed.

System software includes DIOEasy for digital waveform editing / display, ICEasy for device test development, and Marvin Test Solutions' ATEasy which provides an integrated and complete test executive and test development environment, allowing users to quickly develop and easily maintain test applications.

Offering a total of 20 PXI / PXIe peripheral slots, additional digital and analog test resources can be added to the TS-960e-5G as test needs evolve. The TS-960e-5G is the ideal test solution for semiconductor OEMs, fabless semiconductor vendors, incoming inspection / counterfeit detection labs and packaging / test vendors needing a cost-effective, configurable mmWave test system.

For production test applications requiring integration with an automated handler, the TS-960e-5G is available with the Reid-Ashman OM-1069 manipulator which provides precise positioning of the test head and the flexibility to interface to probers and device handlers.

The TS-960e-5G's device interface board (DIB) / receiver interface is designed to be compatible with virtually any device handler. The TS-960e-5G utilizes the same receiver interface as the TS-960EX-5G, providing DIB compatibility between the two systems. The receiver interface is also compatible with the Opus 3 and TEL probe stations as well as the Seiko Epson E8040 & E8080 device handlers.


The TS-960e-5G can be configured with up to 256 dynamic digital channels. The base platform uses the GX5295 - a 3U PXI, 32 channel, 100 MHz digital I/O card with per channel parametric measurement units (PMUs).

A wide range of digital and analog instrument options can easily be incorporated into the TS-960e-5G for supporting both functional and DC parametric test capabilities. RF instrumentation options include the Keysight M9807 / M9808 PXIe VNAs.

The system is also available with digital vector conversion tools that support ASCII, WGL, STIL, VCD, eVCD and ATP vector formats.

TS-960e-5G Core System Configuration

The TS-960e-5G core system includes the following test resources and capabilities:
  • ICEasy test software development tools
  • ATEasy test executive and programming environment
  • GX3104 SMU with 4 channels each (expandable to 16)
  • DIOEasy digital waveform editing and display tools
  • Embedded i7, quad core controller with Windows®10 OS
  • (64) 100 MHz digital channels with per pin PMU (expandable to 256)
  • (64) static digital channels (expandable to 128), which can be used for fixture ID, UUT static control or DUT board relay control
  • 21-slot, high-power PXI Express chassis
  • Pogo pin, blind-mate receiver interface with 24, 50 GHz RF ports


The test system is supplied with ATEasy and all instrument drivers, virtual instrument panels, and a system self-test. optional in system calibration, as well as ICEasy test software tools which facilitates device test development and characterization such as I-V curve and Shmoo plot tools for analyzing device DC and AC characteristics..

SemiEasy - a production user interface is also provided supporting interface to Handlers, Binning, STDF file generation, Multi-Sockets/DUTs Parallel testing, and more.

ATEasy® Test Executive and Software Development Studio is a comprehensive software development environment featuring a customizable test executive for execution, sequencing, fault analysis and debugging. It is pre-configured with all required instrument drivers, virtual instrument panels, and system selftest to simply startup and software development activities.


  • mmWave packaged and wafer device test / characterization
  • Pilot production and focused production test
  • Automated failure analysis and test